Cite
HARVARD Citation
Kim, S. et al. (2021). A low-power nanoelectromechanical (NEM) device with Al-doped HfO2-based ferroelectric capacitor. Solid-state electronics. p. . [Online].
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Kim, S. et al. (2021). A low-power nanoelectromechanical (NEM) device with Al-doped HfO2-based ferroelectric capacitor. Solid-state electronics. p. . [Online].