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APA Citation
Mallikarjunan, A., Achtyl, J., Yang, R., Huang, C., Chao, S., Gan, L., Tamboli, D., Ridgeway, R., Schlueter, J., Tsai, M., Li, C., & O'Neill, M. (2019). mechanistic Understanding of Low κ Organosilicate Glass Film Planarization. ECS journal of solid state science and technology, 8, P3185–P3189. http://access.bl.uk/ark:/81055/vdc_100117132645.0x000009