Cite
MLA Citation
Jinying Yu et al.. “Revelation of the dislocations in the C-face of 4H-SiC substrates using a microwave plasma etching treatment.” CrystEngComm, vol. 23, no. 2, 2021, pp. 353–359. http://access.bl.uk/ark:/81055/vdc_100119757158.0x000033