Cite
MLA Citation
Mai Hong Minh et al.. “Non-Heat Assistance Plasma-Enhanced Chemical Vapor Deposition of SiCxNyOz Film Using Monomethylsilane, Nitrogen and Argon.” ECS journal of solid state science and technology, vol. 6, 2017, pp. P443–P448. http://access.bl.uk/ark:/81055/vdc_100117435852.0x000002