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HARVARD Citation
Kim, D. et al. (n.d.). Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas. Journal of instrumentation. p. T11001. [Online].
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Kim, D. et al. (n.d.). Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas. Journal of instrumentation. p. T11001. [Online].