Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas. (18th November 2015)

Record Type:: Journal Article
Title:: Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas. (18th November 2015)
Main Title:: Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas
Authors:: Kim, D.-W.
You, S.-J.
Kim, J.-H.
Seong, D.-J.
Chang, H.-Y.
Oh, W.-Y.
Abstract:
Is Part Of:: Journal of instrumentation. Volume 10:Number 11(2015:Nov.)
Journal:: Journal of instrumentation
Issue:: Volume 10:Number 11(2015:Nov.)
Issue Display:: Volume 10, Issue 11 (2015)
Year:: 2015
Volume:: 10
Issue:: 11
Issue Sort Value:: 2015-0010-0011-0000
Page Start:: T11001
Page End:: T11001
Publication Date:: 2015-11-18
Subjects:: Scientific apparatus and instruments -- Periodicals
502.84
Journal URLs:: http://iopscience.iop.org/1748-0221 ↗
http://ioppublishing.org/ ↗
DOI:: 10.1088/1748-0221/10/11/T11001 ↗
Languages:: English
ISSNs:: 1748-0221
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store
Ingest File:: 14972.xml