Cite
HARVARD Citation
Musil, J. et al. (2016). Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering. Vacuum. pp. 43-45. [Online].
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Musil, J. et al. (2016). Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering. Vacuum. pp. 43-45. [Online].