Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering. (November 2016)

• Record Type: Journal Article
• Authors: Musil, J.; Javdošňák, D.; Čerstvý, R.; Haviar, S.; Remnev, G.; Uglov, V.
• Is Part Of: Vacuum. Volume 133(2016)
• Page Start: 43
• Page End: 45
• Publication Date: 2016-11
• Subjects: Vacuum -- Periodicals; 621.55
• DOI: 10.1016/j.vacuum.2016.08.014
• Languages: English
• ISSNs: 0042-207X

Abstract

Highlights: Flexible Al-Si-N films can be prepared by magnetron sputtering. Flexibility of the film is controlled by the energy delivered to the growing film. The energy is controlled by ion bombardment.