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APA Citation
Essa, Z., Pelletier, B., Morin, P., Boulenc, P., Pakfar, A., Tavernier, C., Wacquant, F., Zechner, C., Juhel, M., Autran, J., & Cristiano, F. (2016). modeling boron dose loss in sidewall spacer stacks of complementary metal oxide semiconductor transistors. Solid-state electronics, 126, 163–169. http://access.bl.uk/ark:/81055/vdc_100039237246.0x00005e