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APA Citation
Ohno, Y., Yoshida, H., Kamiuchi, N., Aso, R., Takeda, S., Shimizu, Y., Nagai, Y., Liang, J., & Shigekawa, N. (2020). impact of focused ion beam on structural and compositional analysis of interfaces fabricated by surface activated bonding. Japanese journal of applied physics, 59, . http://access.bl.uk/ark:/81055/vdc_100108257562.0x000064