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APA Citation
Rouf, P., O'Brien, N. J., Buttera, S. C., Martinovic, I., Bakhit, B., Martinsson, E., Palisaitis, J., Hsu, C., & Pedersen, H. (2020). epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition. Journal of materials chemistry, 8(25), 8457–8465. http://access.bl.uk/ark:/81055/vdc_100106407290.0x00001a