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APA Citation
Lehninger, D., Olivo, R., Ali, T., Lederer, M., Kämpfe, T., Mart, C., Biedermann, K., Kühnel, K., Roy, L., Kalkani, M., & Seidel, K. (2020). back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation. Physica status solidi, 217(8), n/a. http://access.bl.uk/ark:/81055/vdc_100103482362.0x000016