Cite
HARVARD Citation
Lehninger, D. et al. (2020). Back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation. Physica status solidi. 217 (8), p. n/a. [Online].
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Lehninger, D. et al. (2020). Back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation. Physica status solidi. 217 (8), p. n/a. [Online].