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APA Citation
Tan, F., Pan, T., Bian, J., Wang, H., & Wang, W. (2020). recursive Bayesian state estimation method for run‐to‐run control in high‐mixed semiconductor manufacturing process. Asian journal of control, 22(3), 1177–1187. http://access.bl.uk/ark:/81055/vdc_100103411511.0x00000e