Cite
HARVARD Citation
Tan, F. et al. (2020). Recursive Bayesian state estimation method for run‐to‐run control in high‐mixed semiconductor manufacturing process. Asian journal of control. 22 (3), pp. 1177-1187. [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Tan, F. et al. (2020). Recursive Bayesian state estimation method for run‐to‐run control in high‐mixed semiconductor manufacturing process. Asian journal of control. 22 (3), pp. 1177-1187. [Online].