Cite
MLA Citation
Tao Wang et al.. “Maskless atmospheric pressure PECVD of SiOx films on both planar and nonplanar surfaces using a flexible atmospheric microplasma generation device.” Plasma processes and polymers, vol. 17, no. 1, 2020, p. n/a. http://access.bl.uk/ark:/81055/vdc_100098795435.0x00001b