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HARVARD Citation
Merenkov, I. et al. (2019). Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films. Journal of the European Ceramic Society. 39 (16), pp. 5123-5131. [Online].
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Merenkov, I. et al. (2019). Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films. Journal of the European Ceramic Society. 39 (16), pp. 5123-5131. [Online].