Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films. Issue 16 (December 2019)

• Record Type: Journal Article
• Authors: Merenkov, I.S.; Katsui, H.; Khomyakov, M.N.; Sulyaeva, V.S.; Pushkarev, R.V.; Tu, R.; Goto, T.; Kosinova, M.L.
• Is Part Of: Journal of the European Ceramic Society. Volume 39:Issue 16(2019)
• Page Start: 5123
• Page End: 5131
• Publication Date: 2019-12
• Subjects: Silicon carbide -- Boron carbide -- Laser chemical vapor deposition -- Hard coatings -- Synergetic effect; Ceramic materials -- Periodicals; Composite materials -- Periodicals; Matériaux céramiques -- Périodiques; Composites -- Périodiques; Ceramic materials; Composite materials; Periodicals; Electronic journals; 666.05
• DOI: 10.1016/j.jeurceramsoc.2019.08.006
• Languages: English
• ISSNs: 0955-2219

Abstract

Abstract: Herein, we report on the synergetic effect of simultaneously using of hexamethyldisilane (HMDS) and trimethylamine borane (TMAB) as precursors for a high-rate laser chemical vapor deposition of SiBCN films. The major components of obtained films were successfully controlled by deposition temperature from B4 C to graphene and β-SiC. In addition, B4 C and graphene/β-SiC films were synthesized from TMAB and HMDS, respectively. The growth rate of SiBCN films was extremely high (up to 1620 μm/h) in contrast to 18 μm/h and 415 μm/h for graphene/β-SiC and B4 C films, respectively. Thermodynamic modeling demonstrated that reactions between nitrogen- and silicon-containing gas species during double-source CVD process could be the possible reason of synergism and growth rate increasing. A mechanical study demonstrated very high hardness (up to 43 ± 7 GPa) and wear resistivity of the SiBCN films. The reported results reveal a significant potential of precursor synergism for the design of new materials with enhanced properties.