Cite
MLA Citation
Li-Wen Su et al.. “Two dimensional simulations of triode VHF SiH4 plasma.” Japanese journal of applied physics, vol. 57, n.d., p. . http://access.bl.uk/ark:/81055/vdc_100087634612.0x000064
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Li-Wen Su et al.. “Two dimensional simulations of triode VHF SiH4 plasma.” Japanese journal of applied physics, vol. 57, n.d., p. . http://access.bl.uk/ark:/81055/vdc_100087634612.0x000064