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APA Citation
Chen, K., Chiu, K., Ogiwara, K., Su, L., Uchino, K., & Kawai, Y. (n.d.). study of spatial profiles of capacitively coupled VHF H2 plasma by simulation. Japanese journal of applied physics, 56, . http://access.bl.uk/ark:/81055/vdc_100087632247.0x000061