Cite
HARVARD Citation
Chen, K. et al. (n.d.). Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation. Japanese journal of applied physics. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Chen, K. et al. (n.d.). Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation. Japanese journal of applied physics. p. . [Online].