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APA Citation
Zoubian, F., Rabat, H., Aubry, O., Dumuis, N., Dozias, S., Muñozrojas, D., & Hong, D. (2019). development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD. Journal of physics, 1243, . http://access.bl.uk/ark:/81055/vdc_100087630106.0x00002b