A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing. (29th August 2018)

• Record Type: Journal Article
• Authors: Liu, Xiaochen; Wang, Lihao; Zhu, Yinfang; Zhao, Junyuan; Zhang, Jinying; Yang, Jinling; Yang, Fuhua
• Is Part Of: Journal of micromechanics and microengineering. Volume 28:Number 11(2018:Nov.)
• Publication Date: 2018-08-29
• Subjects: MEMS probe -- thermal-electrical actuation -- piezo-resistance -- micro-nano structure; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aad927
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 × 58 × 2.5 μ m 3 can generate a force between 1.05 μ N and 16.52 μ N with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 μ V and the sensitivity reaches 4.92 mV μ m −1 . This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.