Cite
APA Citation
Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., van der Wiel, W. G., Gardeniers, J. G. E., & Tas, N. R. (n.d.). 3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures. Journal of micromechanics and microengineering, 28, . http://access.bl.uk/ark:/81055/vdc_100087630320.0x000041