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APA Citation
Koutsoureli, M., Xavier, S., Michalas, L., Lioutas, C., Bansropun, S., Papaioannou, G., & Ziaei, A. (n.d.). electrical properties of nanostructured SiN films for MEMS capacitive switches. Journal of micromechanics and microengineering, 27, . http://access.bl.uk/ark:/81055/vdc_100087555301.0x00003f