Cite
HARVARD Citation
Koutsoureli, M. et al. (n.d.). Electrical properties of nanostructured SiN films for MEMS capacitive switches. Journal of micromechanics and microengineering. p. . [Online].
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Koutsoureli, M. et al. (n.d.). Electrical properties of nanostructured SiN films for MEMS capacitive switches. Journal of micromechanics and microengineering. p. . [Online].