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APA Citation
Kato, A., Hasegawa, Y., Taniguchi, K., Matsushima, M., Kawabe, T., & Shikida, M. (2019). a micro-machined flow sensor formed on copper on a polyimide substrate and its application to respiration measurement. Japanese journal of applied physics, 58, . http://access.bl.uk/ark:/81055/vdc_100087538270.0x000060