Cite
HARVARD Citation
Kato, A. et al. (2019). A micro-machined flow sensor formed on copper on a polyimide substrate and its application to respiration measurement. Japanese journal of applied physics. p. . [Online].
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Kato, A. et al. (2019). A micro-machined flow sensor formed on copper on a polyimide substrate and its application to respiration measurement. Japanese journal of applied physics. p. . [Online].