Oxide-confined VCSELs fabricated with a simple self-aligned process flow. (26th October 2017)

• Record Type: Journal Article
• Authors: Marigo-Lombart, L; Calvez, S; Arnoult, A; Thienpont, H; Panajotov, K; Almuneau, G
• Is Part Of: Semiconductor science and technology. Volume 32:Number 12(2017:Dec.)
• Publication Date: 2017-10-26
• Subjects: VCSEL -- self-aligned -- oxidation; Semiconductors -- Periodicals; 621.38152
• DOI: 10.1088/1361-6641/aa90ae
• Languages: English
• ISSNs: 0268-1242

Abstract

Abstract: We propose a simplified and easier fabrication process flow for the manufacturing of AlO x -confined vertical-cavity surface-emitting lasers (VCSELs) based on combining the oxidation step with a self-aligned process, allowing the mesa etching and two successive lift-off steps based on a single lithography step. The electro-optical confinement achieved by standard lateral oxidation enables a low threshold and a single mode behavior for the VCSEL. This simplified process can largely improve VCSEL manufacturing by reducing the processing time and costs compared to the standard VCSEL process.