Optical discrimination of threading dislocations in 4H-SiC epitaxial layer by phase-contrast microscopy. (6th June 2018)
- Record Type:
- Journal Article
- Title:
- Optical discrimination of threading dislocations in 4H-SiC epitaxial layer by phase-contrast microscopy. (6th June 2018)
- Main Title:
- Optical discrimination of threading dislocations in 4H-SiC epitaxial layer by phase-contrast microscopy
- Authors:
- Hattori, Ryo
Oku, Osamu
Sugie, Ryuichi
Murakami, Kazutsugu
Kuzuhara, Masaaki - Abstract:
- Abstract: The superior nondestructive distinguishability of threading screw dislocations and threading edge dislocations in SiC epitaxial layers by phase-contrast microscopy using our optical system was demonstrated by comparing our experimental results with those obtained by conventional polarized light microscopy, photoluminescence topography, and KOH etching. It was confirmed that phase-contrast microscopy was more effective than polarized light microscopy in terms of the nondestructive discrimination of threading dislocations.
- Is Part Of:
- Applied physics express. Volume 11:Number 7(2018)
- Journal:
- Applied physics express
- Issue:
- Volume 11:Number 7(2018)
- Issue Display:
- Volume 11, Issue 7 (2018)
- Year:
- 2018
- Volume:
- 11
- Issue:
- 7
- Issue Sort Value:
- 2018-0011-0007-0000
- Page Start:
- Page End:
- Publication Date:
- 2018-06-06
- Subjects:
- Physics -- Periodicals
Technology -- Periodicals
621.05 - Journal URLs:
- http://iopscience.iop.org/1882-0786/ ↗
http://ioppublishing.org/ ↗ - DOI:
- 10.7567/APEX.11.075501 ↗
- Languages:
- English
- ISSNs:
- 1882-0778
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 11099.xml