Cite
MLA Citation
A Zotovich et al.. “Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach.” Journal of physics, vol. 51, 2018, p. . http://access.bl.uk/ark:/81055/vdc_100087633290.0x00005b
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
A Zotovich et al.. “Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach.” Journal of physics, vol. 51, 2018, p. . http://access.bl.uk/ark:/81055/vdc_100087633290.0x00005b