Parametric study on the well-oriented growth of InxAl1-xN nanodots by magnetron sputtering. (1st November 2019)

• Record Type: Journal Article
• Authors: Zhao, Yang; Wang, Hui; Li, Xinzhong; Li, Jingjie; Shi, Zhifeng; Wu, Guoguang; Zhuang, Shiwei; Yin, Chuanlei; Yang, Fan
• Is Part Of: Materials science in semiconductor processing. Volume 102(2019)
• Publication Date: 2019-11-01
• Subjects: InxAl1-xN -- Magnetron sputtering -- Nanodots -- Structural properties -- Crystal growth; Semiconductors -- Periodicals; Integrated circuits -- Materials -- Periodicals; Semiconducteurs -- Périodiques; Circuits intégrés -- Matériaux -- Périodiques; Electronic journals; 621.38152
• DOI: 10.1016/j.mssp.2019.104583
• Languages: English
• ISSNs: 1369-8001

Abstract

Abstract: Inx Al1-x N alloys are expected to have immense potential in optoelectronic device applications. However, the synthesis of high quality Inx Al1-x N alloys still remain a difficulty. Herein, we report the growth of Inx Al1-x N alloys on Al2 O3 substrate by radio-frequency magnetron sputtering. The deposition conditions such as nitrogen concentration, substrate temperature and growth time affect the structural and morphological properties of Inx Al1-x N alloys, which were investigated using X-ray diffraction, scanning electron microscope and X-ray photoelectron spectroscopy. The results showed that the Inx Al1-x N alloys grown at lower nitrogen concentration (20%) and higher substrate temperature (500 °C) exhibited phase separation. It was found that the surface morphology of Inx Al1-x N alloys presented a transition from uniform nanodots to disordered nanoclusters with the substrate temperature increased from room temperature to 500 °C. Finally, well-oriented In0 · 62 Al0 · 38 N nanodots were achieved at a nitrogen concentration of 40%, a substrate temperature of 300 °C, and a growth time of 120 min. It was believed that this research will lay a good foundation for the preparation of high-quality InAlN alloys that can be employed in reliable optoelectronic devices.