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APA Citation
Zhang, L., de Marneffe, J., Verdonck, P., Heylen, N., Wen, L. G., Wilson, C., Tokei, Z., Boemmels, J., De Gendt, S., & Baklanov, M. R. (2016). integration of porous low-k dielectrics using post porosity pore protection. Journal of physics, 49, . http://access.bl.uk/ark:/81055/vdc_100086726566.0x00005c