Effect of substrate temperatures on BaCo.1Bi.9O3 NTC thermistor thin films. (15th June 2018)

• Record Type: Journal Article
• Authors: Li, Sheng; Yuan, Changlai; Liu, Xinyu; Liu, Xiao; Liu, Fei; Luo, Yongwei; Li, Xuqiong; Xu, Jiwen
• Is Part Of: Materials science in semiconductor processing. Volume 80(2018)
• Page Start: 118
• Page End: 122
• Publication Date: 2018-06-15
• Subjects: RF magnetron sputtering -- Thin films -- Electrical properties -- Complex impedance spectra; Semiconductors -- Periodicals; Integrated circuits -- Materials -- Periodicals; Semiconducteurs -- Périodiques; Circuits intégrés -- Matériaux -- Périodiques; Electronic journals; 621.38152
• DOI: 10.1016/j.mssp.2018.02.024
• Languages: English
• ISSNs: 1369-8001

Abstract

Abstract: BaCo.1 Bi.9 O3 thin films were successfully prepared by reactive RF magnetron sputtering at different substrate temperature. Crystalline structures, surface morphologies and electrical properties were analyzed by XRD, AFM and resistivity-temperature spectrum. Co ion diffused into the lattice of BaBiO3 to form a solid solution with monoclinic perovskite structure. The root-mean-square value of surface roughness was ~ 4.2 nm for the BCB film deposited at 200 ℃. All thin films exhibited good negative temperature coefficient (NTC) thermistor characteristics. The values of B 25/85, a 25 and ρ 25 of BaCo.1 Bi.9 O3 thin films were in the range of 2538–2730 K, −3.07 to −2.86% K −1 and 345.6–34634.4 Ω cm, respectively. The optimal NTC characteristic ( B 25/85 = 2730 K) with ρ 25 of 345.6 Ω cm was presented in the BaCo.1 Bi.9 O3 thin films grown at 200 ℃ for 4 h. Grains and grain boundaries of BaCo.1 Bi.9 O3 films also showed typical NTC thermistor behavior.