Effect of substrate temperatures on BaCo.1Bi.9O3 NTC thermistor thin films. (15th June 2018)
- Record Type:
- Journal Article
- Title:
- Effect of substrate temperatures on BaCo.1Bi.9O3 NTC thermistor thin films. (15th June 2018)
- Main Title:
- Effect of substrate temperatures on BaCo.1Bi.9O3 NTC thermistor thin films
- Authors:
- Li, Sheng
Yuan, Changlai
Liu, Xinyu
Liu, Xiao
Liu, Fei
Luo, Yongwei
Li, Xuqiong
Xu, Jiwen - Abstract:
- Abstract: BaCo.1 Bi.9 O3 thin films were successfully prepared by reactive RF magnetron sputtering at different substrate temperature. Crystalline structures, surface morphologies and electrical properties were analyzed by XRD, AFM and resistivity-temperature spectrum. Co ion diffused into the lattice of BaBiO3 to form a solid solution with monoclinic perovskite structure. The root-mean-square value of surface roughness was ~ 4.2 nm for the BCB film deposited at 200 ℃. All thin films exhibited good negative temperature coefficient (NTC) thermistor characteristics. The values of B 25/85, a 25 and ρ 25 of BaCo.1 Bi.9 O3 thin films were in the range of 2538–2730 K, −3.07 to −2.86% K −1 and 345.6–34634.4 Ω cm, respectively. The optimal NTC characteristic ( B 25/85 = 2730 K) with ρ 25 of 345.6 Ω cm was presented in the BaCo.1 Bi.9 O3 thin films grown at 200 ℃ for 4 h. Grains and grain boundaries of BaCo.1 Bi.9 O3 films also showed typical NTC thermistor behavior.
- Is Part Of:
- Materials science in semiconductor processing. Volume 80(2018)
- Journal:
- Materials science in semiconductor processing
- Issue:
- Volume 80(2018)
- Issue Display:
- Volume 80, Issue 2018 (2018)
- Year:
- 2018
- Volume:
- 80
- Issue:
- 2018
- Issue Sort Value:
- 2018-0080-2018-0000
- Page Start:
- 118
- Page End:
- 122
- Publication Date:
- 2018-06-15
- Subjects:
- RF magnetron sputtering -- Thin films -- Electrical properties -- Complex impedance spectra
Semiconductors -- Periodicals
Integrated circuits -- Materials -- Periodicals
Semiconducteurs -- Périodiques
Circuits intégrés -- Matériaux -- Périodiques
Electronic journals
621.38152 - Journal URLs:
- http://www.sciencedirect.com/science/journal/latest/13698001 ↗
http://www.elsevier.com/journals ↗ - DOI:
- 10.1016/j.mssp.2018.02.024 ↗
- Languages:
- English
- ISSNs:
- 1369-8001
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 5396.440600
British Library DSC - BLDSS-3PM
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