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APA Citation
Lee, H., Park, J., Xianyu, W., Kim, K., Chung, J., Kyoung, Y., Byun, S., Yang, W., Park, Y., Kim, S., Cho, E., & Shin, J. (2017). degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature. Scientific reports, 7(1), 1–8. http://access.bl.uk/ark:/81055/vdc_100086013133.0x0000de