Cite
HARVARD Citation
Lee, H. et al. (2017). Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature. Scientific reports. 7 (1), pp. 1-8. [Online].
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Lee, H. et al. (2017). Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature. Scientific reports. 7 (1), pp. 1-8. [Online].