Cite
HARVARD Citation
Ma, Z. et al. (2019). Control of hexagonal boron nitride dielectric thickness by single layer etching. Journal of materials chemistry. 7 (21), pp. 6273-6278. [Online].
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Ma, Z. et al. (2019). Control of hexagonal boron nitride dielectric thickness by single layer etching. Journal of materials chemistry. 7 (21), pp. 6273-6278. [Online].