Cite
MLA Citation
E. Penilla and J. Wang. “Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering.” Journal of nanomaterials, vol. 2008, 2008, p. . http://access.bl.uk/ark:/81055/vdc_100082270539.0x00004d