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Hou 侯, Y. et al. (n.d.). A review: aluminum nitride MEMS contour-mode resonator*Project supported by National Natural Science Foundation (Nos. 61274001, 61234007, 61504130), the Nurturing and Development Special Projects of Beijing Science and Technology Innovation Base's Financial Support (No. Z131103002813070), and the National Defense Science and Technology Innovation Fund of CAS (No. CXJJ-14-M32).. Journal of semiconductors. p. . [Online].