Cite
MLA Citation
Adrian Adalberto Garay et al.. “Dry etching of Co2MnSi magnetic thin films using a CH3OH/Ar based inductively coupled plasma.” Vacuum, vol. 111, 2015, pp. 19–24. http://access.bl.uk/ark:/81055/vdc_100074958658.0x00003b
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Adrian Adalberto Garay et al.. “Dry etching of Co2MnSi magnetic thin films using a CH3OH/Ar based inductively coupled plasma.” Vacuum, vol. 111, 2015, pp. 19–24. http://access.bl.uk/ark:/81055/vdc_100074958658.0x00003b