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APA Citation
Park, H., Lee, S., Kim, H. J., Woo, D., Lee, J. M., Yoon, E., & Lee, G. (2018). overall reaction mechanism for a full atomic layer deposition cycle of W films on TiN surfaces: first-principles study. RSC advances, 8(68), 39039–39046. http://access.bl.uk/ark:/81055/vdc_100073406863.0x00001f