Gas sensing applications of the inverse spinel zinc tin oxide. (15th November 2017)

• Record Type: Journal Article
• Authors: Hemmatzadeh Saeedabad, S.; Baratto, C.; Rigoni, F.; Rozati, S.M.; Sberveglieri, G.; Vojisavljevic, K.; Malic, B.
• Is Part Of: Materials science in semiconductor processing. Volume 71(2017)
• Page Start: 461
• Page End: 469
• Publication Date: 2017-11-15
• Subjects: Zn2SnO4 thin film -- Acetone -- Ethanol -- Nitrogen dioxide -- Gas sensor; Semiconductors -- Periodicals; Integrated circuits -- Materials -- Periodicals; Semiconducteurs -- Périodiques; Circuits intégrés -- Matériaux -- Périodiques; Electronic journals; 621.38152
• DOI: 10.1016/j.mssp.2017.09.006
• Languages: English
• ISSNs: 1369-8001

Abstract

Abstract: In this work, we prepared zinc stannate (ZTO) thin films by RF sputtering starting from a sintered ceramic target with Zn:Sn ratio 2:1, by varying the argon/oxygen pressures during the deposition process. Thin films were deposited on alumina substrates at 400 °C, and subsequently annealed at 600 °C in the air. The transparency typical for the as-deposited films was preserved even after their annealing at 600 °C in the air, where the high temperature was crucial for the improvement of the crystalline Zn2 SnO4, ZTO phase, as confirmed by Raman measurements. Additionally, the post-deposition thermal treatment resulted in porous ZTO films suitable for gas sensing application. The structural and surface morphological properties of thin films were investigated by Raman spectroscopy, field emission scanning electron microscopy (FE-SEM) and energy dispersive X-ray analysis (EDX). Finally, the gas sensing properties towards nitrogen dioxide, ethanol and acetone have been tested, showing the high potentiality of this material as the gas sensor for ethanol and acetone at 400 °C, and nitrogen dioxide at 200 °C.