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Estivill, R. et al. (n.d.). 3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology. Microscopy and microanalysis. pp. 521-522. [Online].
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Estivill, R. et al. (n.d.). 3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology. Microscopy and microanalysis. pp. 521-522. [Online].