3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology. (August 2015)
- Record Type:
- Journal Article
- Title:
- 3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology. (August 2015)
- Main Title:
- 3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology
- Authors:
- Estivill, Robert
Grenier, Adeline
Printemps, Tony
Juhel, Marc
Gregoire, Magali
Caubet, Pierre
Blavette, Didier - Abstract:
- Is Part Of:
- Microscopy and microanalysis. Volume 21(2015:Jun.)Supplement 3
- Journal:
- Microscopy and microanalysis
- Issue:
- Volume 21(2015:Jun.)Supplement 3
- Issue Display:
- Volume 21, Issue 3 (2015)
- Year:
- 2015
- Volume:
- 21
- Issue:
- 3
- Issue Sort Value:
- 2015-0021-0003-0000
- Page Start:
- 521
- Page End:
- 522
- Publication Date:
- 2015-08
- Subjects:
- Microscopy -- Periodicals
Microchemistry -- Periodicals
502.82 - Journal URLs:
- https://academic.oup.com/mam ↗
http://journals.cambridge.org/action/displayJournal?jid=MAM ↗
http://link.springer.de/link/service/journals/10005/index.htm ↗
http://firstsearch.oclc.org ↗ - DOI:
- 10.1017/S1431927615003402 ↗
- Languages:
- English
- ISSNs:
- 1431-9276
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD Digital store
- Ingest File:
- 7509.xml