Non-destructive evaluation of depth, thickness and composition of single ZnCdSe nanolayers buried in II-VI heterostructures. (October 2018)

• Record Type: Journal Article
• Authors: Karavaev, M.B.; Ivanova, E.V.; Popova, T.B.; Ivanov, S.V.; Zamoryanskaya, M.V.
• Is Part Of: Superlattices and microstructures. Volume 122(2018)
• Page Start: 516
• Page End: 521
• Publication Date: 2018-10
• Subjects: Heterostructure -- Wide gap II-VI compounds -- Cathodoluminescence -- Electron-probe microanalysis -- Single quantum well -- Nanolayer -- Non-destructive evaluation; Superlattices as materials -- Periodicals; Microstructure -- Periodicals; Semiconductors -- Periodicals; Superréseaux -- Périodiques; Microstructure (Physique) -- Périodiques; Semiconducteurs -- Périodiques; 621.38152
• DOI: 10.1016/j.spmi.2018.06.057
• Languages: English
• ISSNs: 0749-6036

Abstract

Abstract: Wide-gap ZnSe-based nanoheterostructures grown by molecular beam epitaxy are comprehensively studied by electron probe microanalysis and local cathodoluminescence techniques. These non-destructive methods applied in combination allow independent determination of true depth, composition, and thickness of single ZnCdSe nanolayers (NL), located deep inside the heterostructures, with a relative accuracy of 10%. The developed approach is based on the variation of the electron probe energy, which results in different thickness of the region where characteristic x-ray emission and cathodoluminescence occur. The former establishes relation between the NL depth and composition at a fixed NL thickness, as defined by using an original modelling program, while the latter connects the NL thickness and composition. Highlights: Non-destructive evaluation of all parameters of a single nanolayer buried in a heterostructures. Modeling of variable-electron-energy EPMA data in combination with CL spectra. The relative accuracy of determination of depth, thickness, and composition is better than 10%.