Cite
HARVARD Citation
Yamamura, K. et al. (2018). Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing. CIRP annals. 67 (1), pp. 353-356. [Online].
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Yamamura, K. et al. (2018). Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing. CIRP annals. 67 (1), pp. 353-356. [Online].