Epitaxial formation of Ni germanide on Ge(0 0 1) substrate by reactive deposition. (August 2015)
- Record Type:
- Journal Article
- Title:
- Epitaxial formation of Ni germanide on Ge(0 0 1) substrate by reactive deposition. (August 2015)
- Main Title:
- Epitaxial formation of Ni germanide on Ge(0 0 1) substrate by reactive deposition
- Authors:
- Deng, Yunsheng
Nakatsuka, Osamu
Suzuki, Akihiro
Sakashita, Mitsuo
Zaima, Shigeaki - Abstract:
- Abstract: We investigated the crystalline structure of a NiGe layer grown on Ge(0 0 1) substrate through the reactive deposition method. NiGe layers grown at 350 °C are a single crystalline, provided that they are thin enough—below 22 nm. The epitaxial relationship with the Ge(0 0 1) substrate is then as follows: NiGe(1 1 1)//Ge(0 0 1), and NiGe[0 1 ¯ 1]//Ge[1 1 0]. However, the NiGe layer becomes polycrystalline when the thickness reaches 22 nm or thicker. We proposed a two-step deposition method combined with solid-phase reaction to suppress the polycrystalline formation and successfully achieved an epitaxial NiGe layer over 22 nm-thick with an atomically flat interface. We also clarified that the Ge atom is the dominant diffusion species during the reactive deposition and that the Ni atom dominates during the solid-phase reaction.
- Is Part Of:
- Solid-state electronics. Volume 110(2015)
- Journal:
- Solid-state electronics
- Issue:
- Volume 110(2015)
- Issue Display:
- Volume 110, Issue 2015 (2015)
- Year:
- 2015
- Volume:
- 110
- Issue:
- 2015
- Issue Sort Value:
- 2015-0110-2015-0000
- Page Start:
- 44
- Page End:
- 48
- Publication Date:
- 2015-08
- Subjects:
- Nickel -- Germanide -- Epitaxial formation -- Reactive deposition -- Metal/semiconductor contact
Semiconductors -- Periodicals
Semiconducteurs -- Périodiques
621.38152 - Journal URLs:
- http://www.sciencedirect.com/science/journal/00381101 ↗
http://www.elsevier.com/journals ↗ - DOI:
- 10.1016/j.sse.2015.01.009 ↗
- Languages:
- English
- ISSNs:
- 0038-1101
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8327.385000
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 6582.xml