Cite
HARVARD Citation
Xiao, D. et al. (n.d.). A novel sandwich differential capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure. Journal of micromechanics and microengineering. p. . [Online].
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Xiao, D. et al. (n.d.). A novel sandwich differential capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure. Journal of micromechanics and microengineering. p. . [Online].