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APA Citation
Zhao, F., Lim, A., Chen, Z., & Huang, C. (2014). single Crystalline 4H-SiC MEMS Devices with N-P-N Epitaxial Structure. MRS proceedings, (1693), . http://access.bl.uk/ark:/81055/vdc_100030688698.0x00003e
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Zhao, F., Lim, A., Chen, Z., & Huang, C. (2014). single Crystalline 4H-SiC MEMS Devices with N-P-N Epitaxial Structure. MRS proceedings, (1693), . http://access.bl.uk/ark:/81055/vdc_100030688698.0x00003e