Cite
HARVARD Citation
Zhao, F. et al. (2014). Single Crystalline 4H-SiC MEMS Devices with N-P-N Epitaxial Structure. MRS proceedings. p. . [Online].
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Zhao, F. et al. (2014). Single Crystalline 4H-SiC MEMS Devices with N-P-N Epitaxial Structure. MRS proceedings. p. . [Online].